Coarse filter: for the first filter, 5μm above the suspension of particles and more than 10μm sedimentation of particles and a variety of foreign bodies, to filter 5μm prevail. In the efficiency of the filter: the general system of the final filter and high efficiency filter pre-filter, 1-10μm suspended particles, its efficiency is to filter 1μm prevail. High efficiency filter: the general degree of purification of the end of the system filter, filter to protect the middle of high efficiency filter, 1-5μm suspended particles, its efficiency is also subject to filter 1μm. Sub-efficient filter: clean room end filter, high efficiency filter pre-filter, the new wind of the final filter, retain 1μm sub-micron particle size, efficiency to 0.5μm prevail. High efficiency filter: The most important final filter in the clean room, in order to achieve 0.5μm cleanliness level for the purpose, but its efficiency is subject to filter 0.3μm. If the filter 0.1μm prevail, commonly known as ultra-efficient filter.
